Coherent Inc offers a range of laser based process tools based upon their Intelligent Optical Systems (IOS) Product portfolio. There are two tool types available to cell manufacturers:
AethonTM Platform - a workstation optimised for R & D and Process Development
Coherent EquinoxTM Products - a production ready family for either low-volume Pilot lines or high-throughput Fabs.
Each tool has generic process features, summarised in the Models tab. Additional capabilities are outlined in the IOS brochure, which can be downloaded from the Literature tab.