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Bruker's New Deep Trench Probes

Home News Bruker's New Deep Trench Probes
Bruker's New Deep Trench Probes
03 Dec

Bruker's New Deep Trench Probes

Bruker's new PeakForce Deep Trench (PFDT) series of probes are engineered to provide depth metrology and imaging on the most challenging structures encountered on semiconductor samples and optics, including trenches and pits with aggressive aspect ratios and depth of more than 100nm

PeakForce Tapping is well known to be ideal for aggressive geometrics, such as deep and narrow trenches, as it avoids air damping and sticking effects that plague approaches based on resonant modes such as Tapping or non-contact. The cantilever shape, spring constant, and resonance frequency of these probes are highly optimised for PeakForce Tapping, and the spike angle is tilt corrected for Dimension Icon. The result is repeatable, accurate metrology with high throughput and long tip life. Read more.