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Bruker Dimension Edge AFM for Patterned Sapphire Substrates

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Bruker Dimension Edge AFM for Patterned Sapphire Substrates

Bruker Dimension Edge AFM for Patterned Sapphire Substrates

3D metrology for LED resolution

Bruker NanoSurfaces

Bruker's Dimension Edge PSS is the ideal metrology and nano-inspection system for LED substrate and epitaxial manufacturers. As an extension of the Dimension Edge AFM platform, the Edge PSS incorporates the incredible value and resolution for which the Dimension AFM systems are renowned, while also providing a specialised solution for substrate measurements. The system incorporates Bruker's proprietary AutoMET metrology analysis software, which has been designed specifically to meet the needs of patterned sapphire substrate (PSS) suppliers, providing a level of automation and ease of use never before seen in a value-price atomic force microscope.

Using the Dimension Edge PSS with AutoMET provides both the ability to analyse every substrate feature with AFM resolution and to provide automatic statistical data for the entire wafer. Bruker's dedicated PSS analysis package can simultaneously provide data on:

  • Height, width & pitch
  • Side wall angle and feature profile
  • NEW : Assymmetry identification & measurement
  • NEW : Contamination identification
  • NEW : Turn identification & turn angle
  • NEW : Flat top identificaton

For further information please contact us or download the datasheet.

 

                                                

Download the brochure                                              Read more on Bruker's website