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Coherent Excimer Overview

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Coherent Excimer Overview

Coherent

Coherent Inc is the world's largest laser manufacturer and the leader in excimer technology with over 40 years experience. Below is a summary of the excimer lasers, click on the link for further information.

ExciStar XS

ExciStar XS excimer lasers are tabletop systems with an ultra-compact design for easy installation and operation. Due to the integration of the new Almenta tube design, they deliver excellent results in low pulse energy applications.

 

ExciStar XS Wavelength Maximum Energy (mJ) Maximum Repetition Rate (Hz)
  193 5 200/500/1000
  248 10 200/500/1000

IndyStar

The IndyStar series is a rugged high-duty cycle excimer laser designed for fast pulse frequency applications as high as 2000Hz. Based on proven  ALMENTA tube technology, the Semi-S2 certified IndyStar operates over many billion pulse at ultra-short 193nm and 248nm wavelengths.

Indystar Wavelength Maximum Energy (mJ) Maximum Repetition Rate (Hz)
  193 8 1000
  248 12 1000
  193 4 2000
  248 6 2000

COMPex

COMPex lasers are highly effective light sources, featuring a compact design and easy installation and operation. They deliver superior results in demanding applications, such as sold sampling systems (LA-ICP-MS), material research (PLD) and precise materials processing.

 

COMPexPro Wavelength (nm) Maximum Pulse Energy (mJ) Maximum Repetition Rate
COMPexPro 50 193
248
100
150
50
COMPexPro 102 193
248
308
351
240
400
250
200
20
COMPexPro 110 193
248
308
351

200
400
250
200

100
COMPexPro 201
COMPexPro 205
193
248
308
351
400
750
500
300
10/50

 

LPXpro

LPXpro is a family of RoHS compliant excimer lasers, offered at wavelengths of 193nm, 248nm, 308nm and 351nm, with output powers as high as 90W at 248nm. The beam quality, high pulse energy, short pulse length and high peak power of LPXpro and LPFpro lasers combine to optimise UV applications.

 

LPXpro Wavelength (nm) Maximum Energy (mJ) Maximum Repetition Rate (Hz)
LPXpro 210 193
248
308
351
450
800
500
400
100
LPXpro 220 193
248
308
351
300
550
300
200
200
LPXpro 305 193
248
308
351
600
1100
700
400
50

 

LEAP

LEAP is a series of high duty-cycle excimer lasers, offered at wavelengths 248nm and 308nm, with output powers as high as 130W. The beam quality, high stabilised pulse energy of 650mJ, short pulse length and high peak power of LEAP lasers combine to optimise UV manufacturing applications.

 

LEAP Series

Wavelength (nm)

Stabilised Energy Rate (mJ)

Maximum Repetition Rate (Hz)

130K 248 550-650 200
130C 308 550-650 200
150K 248 900-1000 150
150C 308 900-1000 150

2015 Excimer Laser Product Catalogue