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Coherent VYPER High-Power Excimer Laser

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Coherent VYPER High-Power Excimer Laser

Coherent VYPER High-Power Excimer Laser

Multiple beam, very high-power excimer lasers

Coherent

The VYPER Series lasers are multiple beam, very high-power excimer lasers specially designed for Excimer Laser Annealing (ELA). The high demand for high-resolution mobile display manufacturing requires high-grade low-temperature poly-Silicon (LTPS) which can be created only with excimer lasers. The lasers fit perfectly with the high power LineBeam 750 (VYPER), LineBeam 1000 (TwinVYPER) and LineBeam 1500 (TriVYPER) optics.

Features:

  • Highest UV power to enable high throughput applications
  • Excellent energy stability to ensure high production yield
  • EquiSwitch synchronisation to provide lowest jitter
  • Laser data acquisition to allow advanced process control
  • Sealed and purged beam path for stable long term operation
  • Ethernet interface for control and fast data acquisition

For further information please contact us or download the datasheet.

                                                 

     VYPER datasheet                                           Read more on Coherent Inc's website