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Prior XY Stages for Upright Microscopes

Prior XY Stages for Upright Microscopes

An extensive range of motorised XY stages to fit the majority of upright microscopes

Prior Scientific

StageDetailsDatasheet
H101A
114mm x 75mm
1µm or better repeatability
Quiet and reliable
H101A
H101F Flat top stage
114mm x 75mm
1µm or better repeatability
Quiet and reliable
H101F
H105
Semiconductor wafer inspection
154mm x 154mm
1µm or better repeatability
Quiet and reliable
H105
H112
Semiconductor wafer inspection
300mm x 300mm
1µm or better repeatability
Quiet and reliable
H112
H116
Semicondutor wafer inspection
255mm x 215mm
1µm or better repeatability
Quiet and reliable
H116
H116SPN
Wafer shuttle stage
250mm x 210mm
Optical and pressure sensors
H116SPN

H138A
Extended X travel to
accommodate 8 slides
240mm x 71mm
1µm or better repeatability
Quiet and reliable

H138A
HT1111
Hardness testing stage
108mm x 108mm
1µm or better repeatability
Economic and robust
HT1111
ES111
125mm x 75mm
5µm or better repeatability
Economic and robust
ES111