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Bruker Dektak XTL Stylus Profiler

Bruker Dektak XTL Stylus Profiler

Gauge-capable, QA/QC stylus profiling with uncompromised 300mm access

Bruker NanoSurfaces

The new Dektak XTLâ„¢ stylus profiler provides extremely accurate, repeatable, and reproducible metrology for a wide range of applications. With its ability to accommodate samples up to 350mm x 350mm, this system finally brings legendary Dektak performance to 200mm and 300mm wafer manufacturing.

The Dektak XTL features a small footprint and integrated isolation with interlocking doors, making it ideal for today's demanding production floor environments. Its dual-camera architecture enables enhanced spatial awareness, and its high level of automation enhances manufacturing throughput. Bruker's exclusive Vision64 advanced production interface with optional pattern recognition makes data collection an intuitive and repeatable process, and minimises operator-to-operator variability.

With its unique combination of superior performance and ease of use the Dektak XTL is the new standard for industrial thin film deposition monitoring in touch-panel, solar, flat panel display and semiconductor industries for research and QA/QC.

Analyses large samples

  • Encoded 300mm X/Y stage
  • Accommodates 200 & 300mm wafers
  • Up to 350mm x 350mm panels

Industrial design

  • Integrated isolation platform
  • Incorporated keyboard/monitor
  • Small footprint workstation

Optimised features for QA/QC

  • Pattern recognition
  • Advanced production interface
  • Interlocked doors
  • Localised GUI
  • Auto-ready kit for SECS/GEM


Dektak XTL Brochure                                              Read more on Bruker's website