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Bruker Dektak XTL Stylus Profiler

Bruker Dektak XTL Stylus Profiler

Bruker Dektak XTL Stylus Profiler

Gauge-capable, QA/QC profiler for optimal 300mm performance

Bruker NanoSurfaces

 

The Dektak XTL™ stylus profilometer accommodates samples up to 350mm x 350mm, bringing legendary Dektak® repeatability and reproducibility to large-format wafer and panel manufacturing. The Dektak XTL features pneumatic vibration isolation and a fully enclosed workstation with easily accessible interlocking door, making it ideal for today’s demanding production floor environments. Its dual-camera architecture enables enhanced spatial awareness, and its high level of automation maximizes manufacturing throughput.

 

The Dektak XTL features a small footprint and integrated isolation with interlocking doors, making it ideal for today's demanding production floor environments. Its dual-camera architecture enables enhanced spatial awareness, and its high level of automation enhances manufacturing throughput. Bruker's exclusive Vision64 advanced production interface with optional pattern recognition makes data collection an intuitive and repeatable process, and minimises operator-to-operator variability.

 

With its unique combination of superior performance and ease of use the Dektak XTL is the new standard for industrial thin film deposition monitoring in touch-panel, solar, flat panel display and semiconductor industries for research and QA/QC.

 

Analyses large samples

  • Encoded 300mm X/Y stage
  • Accommodates 200 & 300mm wafers
  • Up to 350mm x 350mm panels

 

Industrial design

  • Integrated isolation platform
  • Incorporated keyboard/monitor
  • Small footprint workstation

 

Optimised features for QA/QC

  • Pattern recognition
  • Advanced production interface
  • Interlocked doors
  • Localised GUI
  • Auto-ready kit for SECS/GEM

 

For further information please contact us or download the datasheet.

                                                   

Dektak XTL Brochure                                                 Read more on Bruker's website