Aerotech’s QFOCUS™ QF1 piezo nanopositioning stage offers microscope objective and optics positioning with nanometer-level precision at high speeds. With an ultra-precision capacitive sensor feedback option and high structural stiffness, the QF1 is perfect for demanding scanning applications, microscopy, or any optical application requiring high precision and throughput.
- 100μm closed-loop and 120μm open-loop travels (custom travels available)
- High-stiffness and dynamics resulting in outstanding step-and-settle and scanning performance
- High-precision, frictionless flexure guidance
- Long device lifetime
- Superior positioning resolution and linearity with direct-metrology capacitive sensor option
- Variety of threaded adapters for quick and easy attachment to the microscope and objective
- Clear aperture to 29 mm
The QFOCUS QF1 piezo stage is guided by precision flexures that are optimised using finite element analysis to ensure high stiffness and long device life. The resulting design offers outstanding stiffness and resonant frequency, enabling high process throughput and fast closed-loop response. Furthermore, the QF1 has been designed to provide excellent geometric performance (straightness and angular errors) for critical microscopy and optics positioning applications.
High Resolution and Positioning Accuracy
The QF1 has the option of closed-loop feedback (-C) using a unique capacitive sensor design that allows for sub-nanometre resolution and high linearity. The capacitive sensors measure the output of the positioning carriage directly, enabling superior accuracy and repeatability.
When coupled with Aerotech’s Q-series controllers and drives, the QF1 demonstrates sub-nanometre positioning resolution and in-position stability (jitter), and high positioning bandwidth. Software options such as Aerotech’s Dynamic Controls Toolbox and Motion Designer packages provide a host of advanced yet easy-to-use tools such as Learning Control, Harmonic Cancellation, and Command Shaping, providing improved tracking errors and faster step-and-settle times. OEM drive options are also available.