New Laser Driven Light Source

Energetiq have built upon the success of previous models to develop their next-generation light source, the EQX-850 LDLS. Its innovative design offers enhanced performance, user experience, and value to meet the tough demands of the leading-edge semiconductor processes.

Features and benefits:

• Ensures uniform results across all tools and processes.
• Delivers unrivaled short-term stability and higher spectral radiance.
• Features a modular design for easy maintenance and eliminates the need for water cooling.
• Includes event logging, remote software interface controls, and performance monitoring.