Coherent COMPex Excimer Laser

COMPex excimer lasers are highly effective light sources, featuring compact design, easy installation and operation. They deliver superior results in demanding applications, such as solid sampling systems (LA-ICP-MS), materials research (PLD) and precise material processing.

The COMPex provides multi-hundred millijoules pulse energy plus unmatched pulse-to-pulse stability. The COMPex also comes with an improved gas processor that extends both gas and optics operation.

The new COMPex F2 dual wavelength 157 nm / 193 nm has been designed to extend the available wavelength range of the COMPex family, enabling conversion-free very short UV laser light at 157nm. The laser delivers 32mJ at 157 nm and 400mJ at 193nm.

Features:

• Selection of 157 nm, 193 nm, 248 nm, 308 nm, 351 nm wavelengths for full material flexibiltiy
• Superior pulse energy of up to 750mJ to enable effective ablation at large field size
• Unrivalled pulse stability of 0.75% rms to ensure high fluence control
• Ultimate pulse control and system parameter logging to deliver smart and reproducible thin films