Coherent LAMBDA SX High-power Excimer Laser

The LAMBDA SX industrial excimer lasers series provides unique high UV power to the production floor. It is designed to deliver the best energy stability available and also features a number of innovative technologies for unsurpassed performance and reliability.

The LAMBDA SX lasers are perfectly suited for Excimer Laser Annealing (ELA) industrial scale Pulsed Laser Deposition (PLD), Laser Lift-Off (LLO), micro structuring, and all other applications which require high UV laser throughput.

Features include:

• Perfect energy stability to ensure produciton yield
• Pulse on Demand to enable cost effective Laser Lift-Off
• Laser data acquisition to allow advanced process control
• Sealed and purged beam path for stable long term operation
• Ethernet interface for control and fast data acquisition