Coherent VYPER High-Power Excimer Laser

The VYPER Series lasers are multiple beam, very high-power excimer lasers specially designed for Excimer Laser Annealing (ELA). The high demand for high-resolution mobile display manufacturing requires high-grade low-temperature poly-Silicon (LTPS) which can be created only with excimer lasers. The lasers fit perfectly with the high power LineBeam 750 (VYPER), LineBeam 1000 (TwinVYPER) and LineBeam 1500 (TriVYPER) optics.

Features:

• Highest UV power to enable high throughput applications
• Excellent energy stability to ensure high production yield
• EquiSwitch synchronisation to provide lowest jitter
• Laser data acquisition to allow advanced process control
• Sealed and purged beam path for stable long term operation
• Ethernet interface for control and fast data acquisition