Evactron Easy Plasma Software (EPSC) tabletop plasma cleaner

The ultimate in flexibility, the Evactron Easy Plasma SoftClean (EPSC) combines the Evactron E16 remote Plasma De-Contaminator with the Evactron SoftClean System, creating an easy to use chamber and desktop plasma cleaner. It can also be used as a specimen storage system, keeping samples in a contamination-free environment.

The EPSC system is equipped with three cleaning ports for TEM specimen rods and a top-loading lid for SEM samples. The central location of the cleaning ports allows for simultaneous and uniform cleaning of all TEM rods. Optional, patented Safar TEM side loaders (Patent US 8,716,676 B2) feature a side-entry slot and locking mechanism which prevents any unwanted contact between the sample rods and the chamber stage during insertion and removal of the TEM rods.

Program ignition power, cleaning power, cycle time, and number of cycles through the tethered touchpad for flexible cleaning of hard and soft materials. Using room air as a source gas, the E16 plasma creates reactive oxygen radicals and efficiently removes hydrocarbon contamination from SEM/TEM samples and sample holders.

Three TEM cleaning pods - Holds up to three TEM specimen rods, centrally positioned for uniform cleaning

Top-loading lid - Opens from the top for easy loading of SEM samples

Programmable touchpad - Sets ignition power, cleaning power, cycle time and cycle count

Room-air operation - Runs on room air to generate reactive oxygen radicals - with alternate-gas capability when a specific chemistry is needed

For SEM and TEM - Cleans and stores both SEM samples and TEM specimen rods and holders

Adjustable sample platform - Height adjustable platform positions SEM samples for optimal cleaning

Dual target cleaning - Strips hydrocarbon contamination from both samples and holders

Autotune ignition - Automatically tunes the plasma for reliable ignition - no manual matching