TMC Stage-Base System

TMC continues to apply advancing technology to develop new solutions to the challenging demands that semiconductor tools place on their vibration isolation systems. Stage-Base 450 is specifically designed to be the primary vibration cancellation system for advanced semiconductor tools which incorporate high-precision motorised X-Y stages. While such tools require extremely efficient vibration cancellation, just as critical, they require that payload motion induced by the stage settle very quickly to maximize tool throughput. With the addition of VCM with feed-forward control for even faster settling time to further increase throughput, the result is the most advanced Active Vibration and Motion Cancellation system for moving stage applications.

Features:

• Incorporates unique STACIS technology
• Employs high-force, extended stroke piezoelectric actuators
• Position repeatability of payload to within microns
• Frame-mountable design
• 6 active degrees-of-freedom
• Optional feedforward and/or feedback with VCM
• Active vibration isolation starting at 0.6Hz
• Fast settling time in response to stage motion
• No soft air suspension
• High speed digital controller with PC-Based Graphical User Interface (GUI) via USB2.0
• Simple, robust and cost-effective