Latest Advances in Scanning Microwave Impedance Microscopy

Wednesday 2 March 2022
Session 1 : 5am NZDT, 3am AEDT, 12 midnight AWST (Tuesday 1 March) OR
Thursday 3 March 2022
Session 2 : 2pm NZDT, 12 noon AEDT, 9am AWST

Scanning Microwave Impedance Microscopy (sMIM) is a Scanning Probe Microscopy (SPM) method based on a near-field microwave imaging technique which characterises local variations in permittivity and conductivity of materials with nanoscale spatial resolution. This webinar will illustrate how the sMIM method can be applied to a wide variety of samples such as 1D & 2D materials, ferro-electrics, dielectrics and semiconductors by sharing several case studies, including:

• 2D carrier profiling of semiconductor devices
• Dielectric constant mapping on thin dielectric films
• Characterisation of 1D and 2D materials

Particular attention will be given to some of the advanced implementations of this powerful mode enabled on Bruker AFM systems:

• Peakforce sMIM: Allows for the simultaneous mapping of mechanical properties and extends the sample range beyond the constraints of contact mode, providing vastly expanded flexibility
• DataCube sMIM: C-V (and R-V) spectra in every pixel of the image, providing maximum insight in the material properties
• ScanWave Pro Solutions: Quantitative carrier profiling

The presentation also compares sMIM with other SPM modes for electrical characterisation.

Speakers:

Nicholas Antonious, PrimeNano Inc
Ravi Chintala, Bruker
Peter De Wolf, Bruker