Bruker Dektak XTL Stylus Profiler

The Dektak XTL™ stylus profilometer accommodates samples up to 350mm x 350mm, bringing legendary Dektak® repeatability and reproducibility to large-format wafer and panel manufacturing. The Dektak XTL features pneumatic vibration isolation and a fully enclosed workstation with easily accessible interlocking door, making it ideal for today’s demanding production floor environments. Its dual-camera architecture enables enhanced spatial awareness, and its high level of automation maximizes manufacturing throughput.

Robust - Programs fiducials and unlimited measurement sites to maximise throughput and minimise errors

Dual camera control - simplifies measurement setup and navigation to points of interest faster

Easy analysis and data collection - Automates analysis routines and reports only desired features on complex samples

The Dektak XTL builds upon over 50 years of stylus expertise and application customisation for production facilities to meet the stringent industry roadmaps of both today and tomorrow. The 300-millimeter, high-accuracy encoded XY staging gives manufacturers a reliable tool to meet stringent gage R&R requirements. Dektak’s Dual Camera Control with high-magnification dual view cameras offers enhanced spatial awareness. Point-and-click positioning in the live video allows operators to quickly place samples at the right location for quick and easy measurement setup and automation programming. The system’s large interlocked door provides safe and easy access for sample loading/unloading.