Compact yet simplified plasma cleaner for Electron and Ion Beam Instruments
The Evactron E16 De-Contaminator is a compact yet simplified plasma cleaner for Electron and Ion Beam Instrument load locks such as SEMs, TEMs, FIBs, and sample preparation chambers. The E16 delivers gentle and effective cleaning for superior resolution and imaging plus improved detector and probe sensitivity that are compromised by contamination.
New design features of the Evactron E16 Plasma Radical Source (PRS) include a unique flush-mounting flange and compact size to fit in restricted spaces on a chamber wall. The Evactron E16 Power Centre controller has a small footprint and can be placed horizontally or vertically to conserve space.
Flush-mounting flange - a unique flush-mount flange fits in restricted spaces on a chamber wall
Compact PRS - A small Plasma Radical Source built for tight clearances around the instrument
Space-saving controller - A small footprint Power Centre, mountable horizontally or vertically
Touchpad recipes - Cleaning recipes are programmed directly via touchpad
Auto-tune Ignition - Automatically tunes the plasma - no match-tuning or gas-flow adjustments needed
Turbo-pump (TMP) compatible - Clean with the turbo pump running and no advance venting; TÜV, NRTL and CE certified.
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Sales and Applications EM
Sydney • New South Wales