Bruker Introduces Most Advanced Bencthop Stylus Profilometer

Bruker Introduces Most Advanced Bencthop Stylus Profilometer

Bruker Corporation have announced the release of the Dektak Pro^TM stylus profilometer, the next-generation profiler in the industry-leading Dektak® product line. Incorporating over 55 years of innovation, the new benchtop system provides an expanded measurement area up to 200 mm of full-sample access for semiconductor applications, as well as a shortened time to results with improved user experience and measurement accuracy. Dektak Pro incorporates advancements that solidify the brand as the world’s most advanced stylus profiler, positioning it to address R&D, process development, and QA/QC present and future needs across a host of industrial and research markets.

Widely utilised in microelectronics, semiconductor, display, solar, medical, and materials science markets, Dektak stylus profilers are an essential precision metrology instrument found in literally hundreds of production, research, and failure analysis facilities around the world. Dektak systems are employed in both 2D profilometry and 3D surface profiling applications to measure stress, nanometer film thicknesses, and step heights with better than 4 angstrom repeatability. The new Dektak Pro introduces step height and stress measurement updates that expand its usage. A streamlined automatic step detection routine requires less user-defined parameters for a simplified analysis that reduces user-based variability. 2D stress measurement analysis is now more customisable than ever, allowing for user-defined areas and refining precision through artifact thresholds. Fast characterisation of wafer warpage and 3D stress analysis are also made possible by new automatic centering and wafer mapping features.

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