Stanford CIS Closed Ion Source Gas Analysers

With better than 1ppm detection limit, direct sampling at mTorr pressure, and a user- friendly Windows software package, the CIS systems from Stanford Research Systems will satisfy your most demanding applications. On-line process monitoring and control, verification of process gas purity at the point of use, high-vacuum residual gas analysis, and proces equipment leak checking are some of the areas where these systems will prove indispensable.

Features:

• 100, 200 and 300 amu systems
• 1ppm detection
• 10mTorr max. operating pressure
• 1 x 10^-12 Torr detection limit
• Real-time RGA Windows software
• Multi-head operation
• RGA and CIS mode

The probe consists of a quadrupole mass spectrometer with a CIS ioniser mounted inside a 2.75" Conflat® Tee. The control unit mounts directly on the probe's feedthrough flange and contains all the necessary electronics for operating the instrument. The side port of the CIS nipple provides a connection for the differential pumping system that keeps the quadrupole, filament and detector at high vacuum. The system can be connected directly to a process chamber through its standard CIS mounting flange (2.75" CF). The unit is self-aligning, with a simple, robust design. You can clean and reassemble the probe, and replace the filament and electron multiplier in the field.

For further information please contact us or download the datasheet.