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Stanford CIS Closed Ion Source Gas Analysers

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Stanford CIS Closed Ion Source Gas Analysers

Stanford CIS Closed Ion Source Gas Analysers

Compact design, gold plated ioniser, versatile

Stanford Research Systems

With better than 1ppm detection limit, direct sampling at mTorr pressure, and a user- friendly Windows software package, the CIS systems from Stanford Research Systems will satisfy your most demanding applications. On-line process monitoring and control, verification of process gas purity at the point of use, high-vacuum residual gas analysis, and proces equipment leak checking are some of the areas where these systems will prove indispensable.


  • 100, 200 and 300 amu systems
  • 1ppm detection
  • 10mTorr max. operating pressure
  • 1 x 10-12 Torr detection limit
  • Real-time RGA Windows software
  • Multi-head operation
  • RGA and CIS mode

The probe consists of a quadrupole mass spectrometer with a CIS ioniser mounted inside a 2.75" Conflat® Tee. The control unit mounts directly on the probe's feedthrough flange and contains all the necessary electronics for operating the instrument. The side port of the CIS nipple provides a connection for the differential pumping system that keeps the quadrupole, filament and detector at high vacuum. The system can be connected directly to a process chamber through its standard CIS mounting flange (2.75" CF). The unit is self-aligning, with a simple, robust design. You can clean and reassemble the probe, and replace the filament and electron multiplier in the field.

For further information please contact us or download the datasheet.

CIS datasheet Read more on Stanford's website