Energetiq EQX-850 LDLS

A next-generation product, the EQX-850 LDLS builds on the success of previous models offering enhanced performance, user experience, and value.

The EQX-850 enables higher resolution metrology to meet the stringent demands of the leading-edge semiconductor processes with faster, more precise measurements, thanks to unmatched stability and brightness.

Features:

• Wavelength : 170 nm - 2500 nm
• Plasma Size (FWHM) : 140 µm x 290 µm
• Numerical Aperture : 0.58NA
• Buld lifetime : 10,000 hours
• Laser class: Class 1 (IEC 60825:2014)

Tool-To-Tool Matching: Ensures consistency across different tools and processes. Delivers uniform performance across all units.
Stability & Brightness: Provides unrivaled short-term stability with higher spectral radiance, especially in the deep UV range.
Improved Design: Features a modular crown for easy maintenance, eliminating the need for water cooling.
Smart Features & Controls: Includes event logging for setup and troubleshooting, enhanced remote software interface controls, and performance monitoring to maintain optimal measurements.

For further information please contact us or download the datasheet.