Coherent Excimer Overview
Coherent Excimer Overview
Coherent Inc is the world's largest laser manufacturer and the leader in excimer technology with over 40 years experience. Below is a summary of the excimer lasers, click on the link for further information or download the latest Excimer Catalogue.
ExciStar
ExciStar excimer lasers are tabletop systems with an ultra-compact design for easy installation and operation. Due to the integration of the new Almenta tube design, they deliver excellent results in low pulse energy applications.
Wavelength | Stabilised Energy (mJ) | Maximum Energy (mJ) | Maximum Repetition Rate (Hz) |
193 | 5 | 12 | 200/500/1000 |
248 | 10 | 16 | 200/500/1000 |
IndyStar
The IndyStar series is a rugged high-duty cycle excimer laser designed for fast pulse frequency applications as high as 2000Hz. Based on proven ALMENTA tube technology, the Semi-S2 certified IndyStar operates over many billion pulse at ultra-short 193nm and 248nm wavelengths.
Indystar | Wavelength | Maximum Energy (mJ) | Maximum Repetition Rate (Hz) |
193 | 8 | 1000 | |
248 | 12 | 1000 | |
193 | 4 | 2000 | |
248 | 6 | 2000 |
COMPex
COMPex lasers are highly effective light sources, featuring a compact design and easy installation and operation. They deliver superior results in demanding applications, such as sold sampling systems (LA-ICP-MS), material research (PLD) and precise materials processing.
COMPexPro | Wavelength (nm) | Maximum Pulse Energy (mJ) | Maximum Repetition Rate |
COMPexPro 50 | 193 248 |
100 150 |
50 |
COMPexPro 102 | 193 248 308 351 |
240 400 250 200 |
20 |
COMPexPro 110 | 193 248 308 351 |
200 |
100 |
COMPexPro 201 COMPexPro 205 |
193 248 308 351 |
400 750 500 300 |
10/50 |
LEAP
LEAP excimer lasers deliver a unique combination of high duty-cycle output, outstanding reliability, and low cost-of-ownership. This makes them an ideal source for a diverse assortment of demanding, high throughput, high-precision microprocessing tasks, ranging from display fabrication to reel-to-reel manufacturing of superconductive tape. LEAP lasers are available at wavelengths of either 193nm, 248nm or 308nm, with output powers of up to 300W (and pulse energies of up to 1J).
LEAP Series |
Wavelength (nm) |
Stabilised Energy Rate (mJ) |
Maximum Repetition Rate (Hz) |
50A | 193 | 250 | 200 |
60A | 193 | 400 | 150 |
80K | 248 | 650 | 125 |
80C | 308 | 650 | 125 |
100K | 248 | 1000 | 100 |
100C | 308 | 1000 | 100 |
130K | 248 | 650 | 200 |
130C | 308 | 650 | 200 |
150K | 248 | 1000 | 150 |
150C | 308 | 1000 | 150 |
300K | 248 | 1000 | 300 |
300C | 308 | 1000 | 300 |