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Coherent Excimer Overview

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Coherent Excimer Overview

Coherent

Coherent Inc is the world's largest laser manufacturer and the leader in excimer technology with over 40 years experience. Below is a summary of the excimer lasers, click on the link for further information or download the latest Excimer Catalogue.

 

ExciStar XS

ExciStar XS excimer lasers are tabletop systems with an ultra-compact design for easy installation and operation. Due to the integration of the new Almenta tube design, they deliver excellent results in low pulse energy applications.

 

 Wavelength  Stabilised Energy (mJ)  Maximum Energy (mJ)  Maximum Repetition Rate (Hz)
193 5 12 200/500/1000
248 10 16 200/500/1000

 

IndyStar

The IndyStar series is a rugged high-duty cycle excimer laser designed for fast pulse frequency applications as high as 2000Hz. Based on proven  ALMENTA tube technology, the Semi-S2 certified IndyStar operates over many billion pulse at ultra-short 193nm and 248nm wavelengths.

 

Indystar Wavelength Maximum Energy (mJ) Maximum Repetition Rate (Hz)
  193 8 1000
  248 12 1000
  193 4 2000
  248 6 2000

 

COMPex

COMPex lasers are highly effective light sources, featuring a compact design and easy installation and operation. They deliver superior results in demanding applications, such as sold sampling systems (LA-ICP-MS), material research (PLD) and precise materials processing.

 

COMPexPro Wavelength (nm) Maximum Pulse Energy (mJ) Maximum Repetition Rate
COMPexPro 50 193
248
100
150
50
COMPexPro 102 193
248
308
351
240
400
250
200
20
COMPexPro 110 193
248
308
351

200
400
250
200

100
COMPexPro 201
COMPexPro 205
193
248
308
351
400
750
500
300
10/50

 

LEAP

LEAP excimer lasers deliver a unique combination of high duty-cycle output, outstanding reliability, and low cost-of-ownership. This makes them an ideal source for a diverse assortment of demanding, high throughput, high-precision microprocessing tasks, ranging from display fabrication to reel-to-reel manufacturing of superconductive tape. LEAP lasers are available at wavelengths of either 193nm, 248nm or 308nm, with output powers of up to 300W (and pulse energies of up to 1J).

 

LEAP Series

Wavelength (nm)

Stabilised Energy Rate (mJ)

Maximum Repetition Rate (Hz)

50A    193 250 200
60A 193 400 150
80K 248 650 125
80C 308 650 125
100K 248 1000 100
100C 308 1000 100
130K 248 650 200
130C 308 650 200
150K 248 1000 150
150C 308 1000 150
300K 248 1000 300
300C 308 1000 300

2020 Excimer Laser Product Catalogue