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Coherent IndyStar Excimer Laser

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Coherent IndyStar Excimer Laser

Coherent IndyStar Excimer Laser

Rugged high duty cycle excimer laser


IndyStar is a rugged high-duty cycle excimer laser designed for fast pulse frequency applications as high as 2000Hz. Based on proven ALMETA tube technology, the Semi-S2 certified IndyStar operates over many billion pulses at ultra-short 193nm and 248nm wavelengths. The IndyStar series is engineered to meet the highest demands in every aspect of an industrial laser.


  • Repetition rate of 1kHz and 2kHz for fast processing
  • Semi-S2 compliant and premix gas supply to facilitate production floor integration
  • ALEMTA tube design to ensure most efficient processing
  • POWERLOK and TIMELOK functionalities for ultimate pulse control
  • Available for 193nm and 248nm

For further information please contact us or download the datasheet.

IndyStar datasheet 2020 Excimer Laser Catalogue

Read more on Coherent Inc's website