Aerotech QFOCUS QF50Z Single-Axis, Microscope Objective, Piezo Nanopositioning Stage

Aerotech's QFOCUS® QF-50 piezo nanopositioning stage offers microscope objective and optics positioning with nanometer-level precision at high speeds. The QF-50 is designed to accommodate newer optical instruments and next-generation laser micromachining applications. Due to a high-stiffness mechanical design, the QF-50 can outperform competitive piezo scanner offerings with larger, higher numerical aperture (NA) objectives. The QF-50 is ideal for demanding optical positioning applications requiring high precision and throughput coupled with long travels.

Features:

• 400μm closed-loop and 450μm open-loop travels (custom travels available)
• Outstanding step-and-settle and scanning performance
• Designed for use with larger, high-NA objectives
• Superior positioning resolution and linearity
• Mounting flexibility
• Clear aperture to 29 mm

Precision Design
The QFOCUS QF-50 piezo stage is guided by precision flexures that are optimised using finite element analysis. The resulting design offers outstanding stiffness and resonant frequency enabling high process throughput and fast closed-loop response.

In addition to designing for high-dynamics, meticulous care was taken in the QF-50 flexure bearing design allowing for unrivaled geometric performance with straightness errors to 40 nm throughout the entire travel range.

Direct Metrology Feedback
The QF-50 piezo stages have the option of closed-loop feedback (-C) using a unique capacitive sensor design that allows for sub-nanometer resolution and high linearity. Unlike foil strain gages or piezoresistive sensors, capacitive sensors provide a direct measurement of the positioning carriage enabling superior accuracy and repeatability.

Flexible and Precise Control
When coupled with Aerotech's Q-series controllers and drives, the QF-50 demonstrates sub-nanometer positioning resolution and in-position stability (jitter) while maintaining high-positioning bandwidth. A host of software options (Dynamic Controls Toolbox and Motion Designer) provide many advanced yet easy-to-use tools such as Learning Control, Harmonic Cancellation, and Command Shaping, providing improved tracking errors and faster step-and-settle times. OEM drive options are also available.

For further information please contact us or download the datasheet.