Prior XY Stages for Upright Microscopes
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Prior XY Stages for Upright Microscopes
An extensive range of motorised XY stages to fit the majority of upright microscopes
| Stage | Details | Datasheet |
 | H101A 114mm x 75mm 1µm or better repeatability Quiet and reliable | H101A |
 | H101F Flat top stage 114mm x 75mm 1µm or better repeatability Quiet and reliable | H101F |
 | H105 Semiconductor wafer inspection 154mm x 154mm 1µm or better repeatability Quiet and reliable | H105 |
 | H112 Semiconductor wafer inspection 300mm x 300mm 1µm or better repeatability Quiet and reliable | H112 |
 | H116 Semicondutor wafer inspection 255mm x 215mm 1µm or better repeatability Quiet and reliable | H116 |
 | H116SPN Wafer shuttle stage 250mm x 210mm Optical and pressure sensors | H116SPN |
 | H138A | H138A |
 | HT1111 Hardness testing stage 108mm x 108mm 1µm or better repeatability Economic and robust | HT1111 |
 | ES111 125mm x 75mm 5µm or better repeatability Economic and robust | ES111 |