TMC Quiet Island Sub-Floor Platforms and Supports

Semiconductor manufacturing factories (fabs) incorporate a system of raised false floors to accommodate complex facilities requirements (plumbing, electrical cables, gas piping etc) and to maintain strict cleanliness standards. Such floors present a challenge to the installation of extremely vibration-sensitive production, inspection, and metrology equipment. The raised floors cannot provide the necessary quiet vibration environment for such tools.

TMC's Quiet Island® is an innovative solution that replaces a section of the raised floor area with a "Quiet Island" anchored to the sub-floor below. The Quiet Island consists of a special platform combined with a dedicated support structure, the nature of which depends upon the application.

The platform is designed and manufactured by TMC. It is 100mm thick lamination of steel plates sandwiched around a lightweight, incompressible, damped core material. The layering effect of rigid steel plates and core, epoxy bonded into a seamless, stainless steel pan provides an extremely high level of stiffness and structural damping. The large cross-section and steel content yield a very high level of overall rigidity. The top and sides are a continuous, one-piece, stainless steel shell to preserve cleanliness, appearance and integrity.

For further information please contact us or download the datasheet.