TMC SEM-Base VI Active Piezoelectric Vibration Cancellation

SEM-Base® VI is the next generation in STACIS active piezoelectric vibration cancellation. SEM-Base VI is designed to support all commercial Scanning Electron Microscopes (SEM's), as well as many Focused Ion Beam (FIB) and Small Dual Beam instruments. SEM-Base VI provides improved vibration isolation performance, a faster more robust controller, and an advanced graphical user interface (GUI). SEM-Base VI will enable more labs and facilities to achieve the level of floor vibration required to satisfy the specifications of the tool manufacturer.

Hard-Mount Technology - SEM-Base VI is compatible with all internal SEM vibration control systems and aggressively mitigates low frequeny floor vibration starting at 0.6Hz.

Active Inertial Vibration Cancellation - SEM-Base VI uses high sensitivity, low frequency inertial velocity sensors to achieve high levels of vibration attenuation, even on quiet floors.

Serial Design with Piezoelectric Technology - The unique serial design and proprietary highforce piezoelectric technology results in a wide active bandwidth from 0.6Hz to 150Hz and unmatched, inertial active vibration cancellation with 90% reduction starting at 2Hz

For further information please contact us or download the datasheet.