TMC STACIS III Isolator System

STACIS® III is a flexible advanced active vibration cancellation system. Employing advanced inertial sensors and state-of-the-art piezoelectric actuators, STACIS cancels vibration in real time by sensing floor vibration, then expanding and contracting piezoelectric actuators to filter out floor motion.

Initially designed to isolate precision microlithography, metrology and inspection equipment in advanced semiconductor factories, STACIS is now the industry standard solution for the most sensitive instruments in noisy environments, including, but not limited to, semiconductor fabs, failure analysis labs, nanotechnology research, nanofabrication facilities and materials research.

STACIS III includes a new and improved digital controller, the DC-2020. With a new dual-core processor and Ethernet as well as USB serial ports on the front and read panels, this new advanced control system provides the user with a modern and easy to use Graphical User Interface (GUI). With many hundreds of successful installations worldwide, STACIS is the ideal vibration cancellation system for the most vibration-sensitive instruments.

For further information please contact us or download the datasheet.